Channels

 

Special Offers & Promotions

 

 

Latest News

 

 

View Channel

New Products

 

 

View Channel

Video Presentations

 

 

View Channel

Separation Science

 

 

View Channel

Microscopy & Image Analysis

 

 

View Channel

Laboratory Automation & IT Solutions

 

 

View Channel

 

Carl Zeiss has received two orders for the extreme ultraviolet lithography system AIMS EUV

zeissGLOBALFOUNDRIES, Intel, Samsung Electronics, and TSMC are the members of the SEMATECH EMI Partnership. According to the slot assignment two out of the four semiconductor companies have placed orders with Carl Zeiss Semiconductor Metrology Systems (SMS) Division. Carl Zeiss SMS develops the AIMSTM EUV tool in cooperation with the scanner optics department of Carl Zeiss SMT, Lithography Optics (LIT), and external partners. 

"The orders represent an important milestone in the development of AIMSTM EUV and confirm the relevance of EUV technology for the industry. We expect the remaining two EMI members to place their orders in accordance with their slot assignments agreed upon at the start of the EMI consortium." said Dr. Oliver Kienzle, Managing Director of Carl Zeiss SMS. The AIMSTM EUV platform represents a critical tool for the development and manufacturing of defect-free EUVL masks supporting the 22 nm half-pitch (HP) technology node requirements with extendibility to the 16 nm HP node. A first production-worthy version of the platform is scheduled for delivery in the third quarter of 2014.

SEMATECH launched EMI in 2010 to fill a key infrastructure gap for EUV in the area of mask manufacturing, by funding development of critical metrology tools. EMI is administered by SEMATECH's Lithography Program, based at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany.

To initiate EMI's first major project, SEMATECH and Carl Zeiss have signed a collaboration agreement for the development and manufacturing of the industry's first-ever actinic aerial image metrology EUV system targeted for EUVL volume production.

For further information visit


If you have not logged into the website then please enter your details below.



 

Subscribe to any of our newsletters for the latest on new laboratory products, industry news, case studies and much more!

Newsletters from Lab Bulletin

 

Request your free copies HERE

 

 

 

Popular this Month

Top 10 most popular articles this month

 

 

Today's Picks

 


 

Looking for a Supplier?

Search by company or by product

 


Company Name:

Product:


 

 

 

 

Please note Lab Bulletin does not sell, supply any of the products featured on this website. If you have an enquiry, please use the contact form below the article or company profile and we will send your request to the supplier so that they can contact you directly.

Lab Bulletin is published by newleaf marketing communications ltd.


 

Media Partners

 

Exhibitions & Events